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Fachhochschule K"arnten \\
Carinthia University of Applied Sciences\\
Integrated Systems and Circuits Design 
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{\huge {\textbf{MASTER THESIS}}}

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{\Large {\textbf{ 
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Optimization of tool unloading processes in the semiconductor industry  \\}}}

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Submitted in Partial Fulfillment of the Requirements of the Academic Degree\\~\\

Master of Science in Engineering, Msc
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Registration Number:\hspace{1cm}\= \kill
Author:			\> Thomas Michael Pack, BSc \\~\\
Registration Number:	\> 2110528005 \\~\\
Supervisor:		\> Dipl.-Ing- Dr. techn. Matthias Brandstötter \\
			\> CUAS \\~\\
Company supervisor:	\> Dr. Stefan Schabus  \\
			\> Infineon Technologies Austria AG \\~\\
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Villach, September 2023