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bib.bib
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%
% LaTeX-Template for Master Theses
% FH Kaernten
%
% V 1.0
% Feb. 2011
% M.Koeberle
%
% Bibliography
%
% \begin{thebibliography}{99}
% \bibliographystyle{IEEEtran}
% \addcontentsline{toc}{chapter}{Bibliography}
% Encoding: UTF8
% This file was created with Citavi 6.8.0.0
@incollection{Rosing.2015b,
author = {von Rosing, Mark and White, Stephen and Cummins, Fred and de Man, Henk},
abstract = {The Complete Business Process Handbook: Body of Knowledge from Process Modeling to BPM, Volume I, (2015) 813pp. 9780128004722 },
title = {Business Process Model and Notation---BPMN},
urldate = {07.11.2023},
pages = {433--457},
publisher = {{Morgan Kaufmann} and ProQuest},
isbn = {9780127999593 },
series = {The complete business process handbook / Mark von Rosing (Chairman of the Global University Alliance), August-Wilhelm Scheer (Founder of the Institute for Information Systems (IWi)), Henrik von Scheel (CEO of LEADing Practice)},
editor = {von Rosing, Mark and Scheer, August-Wilhelm and von Scheel, Henrik},
booktitle = {Body of knowledge from process modeling to bpm},
year = {2015}
}
@misc{InfineonTechnologiesAG.17.07.2023,
author = {{Infineon Technologies AG}},
year = {17.07.2023},
title = {Infineon Villach: Shell for new chip factory completed - Infineon Technologies},
url = {https://www.infineon.com/cms/austria/en/press/GJ1920/shell-fab.html},
howpublished ={[Online]},
urldate = {27.07.2023}
}
@misc{300mmThinWafer.17.09.2021,
year = {17.09.2021},
title = {Infineon-Chipfab-Thin-Wafer-300-mm-Villach.jpg (827$\times$551)},
urldate = {27.07.2023},
file = {https://www.infineon.com/export/sites/default/_images/regional-pages/austria/presse/Infineon-Chipfab-Thin-Wafer-300-mm-Villach.jpg},
howpublished ={[Online]},
}
@inbook{monch2012production,
title={Production planning and control for semiconductor wafer fabrication facilities: modeling, analysis, and systems},
author={L. Moench, J.W. Fowler and S.J. Mason},
year={2012},
publisher={Springer Science \& Business Media}
}
@misc{Wikipedia.2024,
abstract = {In electronics, a wafer (also called a slice or substrate) is a thin slice of semiconductor, such as a crystalline silicon (c-Si), used for the fabrication of integrated circuits and, in photovoltaics, to manufacture solar cells.
The wafer serves as the substrate for microelectronic devices built in and upon the wafer. It undergoes many microfabrication processes, such as doping, ion implantation, etching, thin-film deposition of various materials, and photolithographic patterning. Finally, the individual microcircuits are separated by wafer dicing and packaged as an integrated circuit.},
editor = {Wikipedia},
year = {2024},
title = {Wafer(electronics)},
url = {https://en.wikipedia.org/w/index.php?title=Wafer_(electronics)&oldid=1193076464},
howpublished ={[Online]},
urldate = {01.08.2024},
file = {41b8f7d1-ea7d-4d59-9e85-650d9e55a258:C\:\\Users\\packthom\\AppData\\Local\\Swiss Academic Software\\Citavi 6\\ProjectCache\\u5pbmh7oxawd18lhdfgms51rcebw1qywcpjo6u74b8hfydg7i\\Citavi Attachments\\41b8f7d1-ea7d-4d59-9e85-650d9e55a258.pdf:pdf}
}
% This file was created with Citavi 6.8.0.0
@misc{ManualFoupHandling,
author = {{M. J. Wang, Hsiu-Chen Chung, and Hsin-Chieh Wu}},
title = {The Evaluation of Manual FOUP Handling in 300mm Wafer Fab},
url = {\url{http://ir.lib.cyut.edu.tw:8080/bitstream/310901800/7337/1/A5.pdf}},
howpublished ={[Online]},
urldate = {08.01.2024}
}
@misc{SEMI,
editor = {Wikipedia},
abstract = {SEMI is an industry association comprising companies involved in the electronics design and manufacturing supply chain. They provide equipment, materials and services for the manufacture of semiconductors, photovoltaic panels, LED and flat panel displays, micro-electromechanical systems (MEMS), printed and flexible electronics, and related micro and nano-technologies.SEMI is headquartered in Milpitas, California, and has offices in Bangalore; Berlin; Brussels; Hsinchu; Seoul; Shanghai; Singapore; Tokyo; and Washington, D.C. Its main activities include conferences and trade shows, development of industry standards, market research reporting, and industry advocacy. The president and chief executive officer of the organization is Ajit Manocha.},
year = {2023},
title = {SEMI},
url = {\url{https://en.wikipedia.org/w/index.php?title=SEMI&oldid=1187566659}},
howpublished ={[Online]},
urldate = {01.10.2024}
}
@misc{Semi.org,
year = {10.01.2024},
title = {Semiconductor equipment and materials international},
url = {\url{https://www.semi.org/eu}},
howpublished ={[Online]},
urldate = {10.01.2024}
}
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